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Articles by keyword: «Oxygen Precipitates»

• Beam Injection Studies of Dislocations and Oxygen Precipitates in Semiconductor Silicon
  Published in: Beam Injection Assessment of Microstructures in Semiconductors (p57)
• Copper in Silicon: Quantitative Analysis of Internal and Proximity Gettering
  Published in: Defects in Semiconductors 19 (p461)
• Defect Control in Nitrogen Doped Czochralski Silicon Crystals
  Published in: Gettering and Defect Engineering in Semiconductor Technology VIII (p161)
• Effect of Oxygen Precipitates on the Surface-Precipitation of Nickel on Cz-Silicon Wafers
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p103)
• Efficiency of Intrinsic Gettering for Copper in Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p349)
• Electrical Properties of Oxygen Precipitates Formed During Two Step Low Temperature Annealing
  Published in: Polycrystalline Semiconductors V (p39)
• Evolution of Oxygen Associated Defects in Cz Silicon during Thermal Annealing Treatments: Comparison between Experiment and Simulation
  Published in: Gettering and Defect Engineering in Semiconductor Technology XIV (p188)
• Formation of Grown-in Defects in CZ-Si Crystals
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p449)
• Formation of Precipitates in 6H-SiC after Oxygen Implantation and Subsequent Annealing
  Published in: Silicon Carbide and Related Materials - 1999 (p961)
• Influence of Size and Density of Oxygen Precipitates of Internal Gettering Efficiency of Iron in Czochralski-Grown Silicon
  Published in: Gettering and Defect Engineering in Semiconductor Technology VII (p75)
• Internal Gettering Efficiency in p/p⁺ and p/p^- Silicon Epistructures
  Published in: Gettering and Defect Engineering in Semiconductor Technology X (p593)
• Internal Gettering in Silicon: Experimental and Theoretical Studies Based on Fast and Slow Diffusing Metals
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p381)
• Laser Scattering Tomography on Magnetic CZ-Si for Semiconductor Process Optimization
  Published in: Gettering and Defect Engineering in Semiconductor Technology XI (p597)
• MC-IR-LST and TEM Combined Analysis of Defects in the OSF-Ring of Cz-Silicon Crystals
  Published in: Beam Injection Assessment of Microstructures in Semiconductors (p211)
• Optical Properties of Oxygen Agglomerates in Silicon
  Published in: Gettering anf Defect Engineering in Semiconductor Technology IX (p75)