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Articles by keyword: «RTCVD»

• 4H-SiC MOS Structures Fabricated from RTCVD Si Layers Oxidized in Diluted N₂O
  Published in: Silicon Carbide and Related Materials 2004 (p673)
• Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC
  Published in: Silicon Carbide and Related Materials - 2002 (p285)
• Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics
  Published in: Ultra Clean Processing of Silicon Surfaces V (p165)
• Influence of Deposition Processing Conditions on Polycrystalline Silicon Thin Film for Solar Cells on Ceramic Substrates
  Published in: PRICM-5 (p1231)
• Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells
  Published in: High-Performance Ceramics III (p1147)
• Structural Study of GaN Layers Grown on Carbonized Si(111) Substrates
  Published in: Silicon Carbide and Related Materials - 2002 (p1003)
• The Expanding Role of Rapid Thermal Processing in CMOS Manufacturing
  Published in: Rapid Thermal Processing and beyond: Applications in Semiconductor Processing (p3)