Keyword: "RTCVD"
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4H-SiC MOS Structures Fabricated from RTCVD Si Layers Oxidized in Diluted N2O

Authors: Amador Pérez-Tomás, Dominique Tournier, Phillippe Godignon, Narcis Mestres, José Millán

673

Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC

Authors: Francisco M. Morales, S.I. Molina, Daniel Araújo, Volker Cimalla, Jörg Pezoldt

285

Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20วบ Thick Ultra-Thin Stack Gate Dielectrics

Authors: Joong S. Jeon, Bob Ogle

165

Influence of Deposition Processing Conditions on Polycrystalline Silicon Thin Film for Solar Cells on Ceramic Substrates

Authors: Hai Feng Li, Yong Huang, Zhi Jian Wan, Hou Xing Zhang, Y. Xu

1231

Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells

Authors: Hai Feng Li, Yong Huang, Zhi Jian Wan, Hou Xing Zhang, Li Ming Zhang, Y. Xu, Xiao Dong Li

1147

Structural Study of GaN Layers Grown on Carbonized Si(111) Substrates

Authors: Francisco M. Morales, A. Ponce, S.I. Molina, Daniel Araújo, R. García, J. Ristic, M.-A. Sánchez-García, Enrique Calleja, Volker Cimalla, Jörg Pezoldt

1003

The Expanding Role of Rapid Thermal Processing in CMOS Manufacturing

Authors: Jim Nakos, Joe Shepard

3