Scientific.Net: Materials Science

Paper Title	Page
4H-SiC MOS Structures Fabricated from RTCVD Si Layers Oxidized in Diluted N₂O Authors: Amador Pérez-Tomás, Dominique Tournier, Phillippe Godignon, Narcis Mestres, José Millán	673
Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC Authors: Francisco M. Morales, S.I. Molina, Daniel Araújo, Volker Cimalla, Jörg Pezoldt	285
Effect of Chemical Oxides Formed During Pre-Gate Oxide Cleaning on the Properties of Sub 20Ǻ Thick Ultra-Thin Stack Gate Dielectrics Authors: Joong S. Jeon, Bob Ogle	165
Influence of Deposition Processing Conditions on Polycrystalline Silicon Thin Film for Solar Cells on Ceramic Substrates Authors: Hai Feng Li, Yong Huang, Zhi Jian Wan, Hou Xing Zhang, Y. Xu	1231
Polycrystalline Silicon Thin Films on SiC Substrates for Solar Cells Authors: Hai Feng Li, Yong Huang, Zhi Jian Wan, Hou Xing Zhang, Li Ming Zhang, Y. Xu, Xiao Dong Li	1147
Structural Study of GaN Layers Grown on Carbonized Si(111) Substrates Authors: Francisco M. Morales, A. Ponce, S.I. Molina, Daniel Araújo, R. García, J. Ristic, M.-A. Sánchez-García, Enrique Calleja, Volker Cimalla, Jörg Pezoldt	1003
The Expanding Role of Rapid Thermal Processing in CMOS Manufacturing Authors: Jim Nakos, Joe Shepard	3

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