Ergonomics in Semiconductor Wafer Manufacturing

Wai Yi Foong; Amir Hamzah bin Hassan

doi:10.4028/www.scientific.net/AEF.10.231

Paper Titles

The Effect of Grip Span on Hand-Gripping Control Strength
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A Review of the NIOSH Lifting Equation and Ergonomics Analysis
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Work Shift Analysis by Using Psycho-Physiological Method
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Ergonomic Evaluation of Postural Assessment among “Canting” Batik Workers
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Ergonomics in Semiconductor Wafer Manufacturing
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Analysis of Vertical Multiplier on Revised National Institute for Occupational Safety and Health (NIOSH) Lifting Equation for Male Workers in Indonesia Industry
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Effects of Lifting Height, Twist Angle and Load Mass on Psychophysical Experience, Muscle Activity and Heart Rate during Manual Lifting
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A Review on Ergonomics Risk Factors and Health Effects Associated with Manual Materials Handling
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Evaluation of Ergonomic Risk of Manual Handling of Patients with MAPO Index and its Relationship with Incidence of Low Back Pain among Nurses
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HomeAdvanced Engineering ForumAdvanced Engineering Forum Vol. 10Ergonomics in Semiconductor Wafer Manufacturing

Ergonomics in Semiconductor Wafer Manufacturing

Abstract:

In semiconductor wafer manufacturing, there are only a few processes but many steps. Each wafer must go through the processes multiple times (steps) and sometimes not in the same sequence. All the wafers in lot size of 25 pieces are transferred between the processes using an Automated Guided Vehicle from stocker to stocker. Then, the wafers are manually transferred to the processing tool. Although the tools are designed per SEMI S2/S8 standards [1,, the equipment technician can get into awkward postures when performing the preventive maintenance. Both the manual material handling between the tools and awkward postures during preventive maintenance can pose an ergonomic challenge. However, some techniques can be used to minimize the impact. This paper shares the techniques which can ease ergonomic problems in semiconductor wafer manufacturing

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Periodical:

Advanced Engineering Forum (Volume 10)

Pages:

231-235

DOI:

https://doi.org/10.4028/www.scientific.net/AEF.10.231

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Online since:

December 2013

Authors:

Wai Yi Foong*, Amir Hamzah bin Hassan

Keywords:

Ergonomics, Manufacturing, Semiconductor Wafer, Silterra

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Creative Commons CC BY 4.0

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* - Corresponding Author

References

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[2] SEMI S8: Safety Guidelines for Ergonomic Engineering of Semiconductor Manufacturing Equipment.

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