Optical Properties of Ta2O5/SiO2 Antireflection Coating System

Shao Ni Sun; Li Yang Xie; Yi Chen Zhang; Ying Huang

doi:10.4028/www.scientific.net/AEF.2-3.167

Paper Titles

Experiments of Ultrasonic Sensing Using FBG Sensors
p.148

Research and Application of Machine Vision in Industry
p.153

Study of Method of Denoising for Triaxial Flight Simulation Turntable Based on Generalized Minimum Variance
p.156

Measurement of Natural Properties of a Beam Based on Machine Vision
p.162

Optical Properties of Ta₂O₅/SiO₂ Antireflection Coating System
p.167

An Intelligent Fire-Detection Method Based on Image Processing
p.172

Two De-Noising Methods Based on Gabor Transform
p.176

A New Extension of the Rank Transform for Stereo Matching
p.182

Signal Denoise Method Based on the Higher Order Cumulant and Local Tangent Space Mean Reconstruction
p.188

HomeAdvanced Engineering ForumAdvanced Engineering Forum Vols. 2-3Optical Properties of Ta2O5/SiO2 Antireflection...

Optical Properties of Ta₂O₅/SiO₂ Antireflection Coating System

Abstract:

The Ta₂O₅/SiO₂ Multi-layer Antireflection Coating Is Prepared on K9 Glass by RF Magnetron Sputtering Technology in the Experiment. the Growth Parameters Are Changed to Get Multi-layer Antireflection Film with Good Optical Properties. in the Technical Research, the Influence of Various Growth Parameters, Including Working Pressure, Oxygen Content, Substrate Temperature, Etc., on the Optical Properties and Structures of the Coatings Are Studied. Optical Properties and Morphological Features such as Surface, Structure Are Investigated by UV-VIS Spectrophotometer and AFM, Respectively. the Detecting Results Further Verify the Important Influences of Proper Growth Parameters on Optical Properties of Antireflection Coating.

By email View Pdf

You have full access to the following eBook

Read eBook

Info:

Periodical:

Advanced Engineering Forum (Volumes 2-3)

Pages:

167-171

DOI:

https://doi.org/10.4028/www.scientific.net/AEF.2-3.167

Citation:

Cite this paper

Online since:

December 2011

Authors:

Shao Ni Sun, Li Yang Xie, Yi Chen Zhang, Ying Huang

Keywords:

Antireflection Coating, Optical Property, Ta₂O₅/SiO₂ Multi-Layer, Technical Study

Export:

RIS, BibTeX

Permissions:

Creative Commons CC BY 4.0

Citation:

References

[1] N.I. Klyuia, V.G. Litovchenkoa, A.G. Rozhina, Silicon solar cells with antireflection diamond-like carbon and silicon carbide films, Solar Energy Materials & Solar Cells. 72(2002) 597-603.

DOI: 10.1016/s0927-0248(01)00209-4

Google Scholar

[2] M.C. Ferrara, D. Altamura, M. Schioppa, Growth, characterization and optical properties of nanocrystalline gadolinia thin films prepared by sol-gel dip coating, Journal of Physics D: Applied Physics. 41(2008) 225408(9pp).

DOI: 10.1088/0022-3727/41/22/225408

Google Scholar

[3] W.H. Yang, G.B. Li, D.X. Wu, Design and Analysis of Anti-Reflection Coating for Solar Cells, Journal of Shanghai University (Natural Science Edition)., 10(2004) 39-42.

Google Scholar

[4] J.H. Sun, B. Zhang, Y. Xu, et al. Preparation and Optical Properties of SiO2 AR coating, Optical Technique. 2(2000)104-106.

Google Scholar

[5] X. Zhang, L.X. Hang, Preparation of anti-reflection films by PECVD technology, Optical Technique. 37(2011)97-100.

Google Scholar