Development of Differential Capacitive Displacement Sensor Based on RC Multi-Oscillating Circuit
In order to meet the demands for high precise micro-displacement testing, a differential capacitive displacement sensor based on RC multi-oscillating circuit was designed. It has two couples of polar plates, and gets the displacement by testing frequency through the multi-oscillating circuit. This capacitive sensor has many advantages such as simple structure and testing circuit, high resolution and good stability.
Kai Cheng, Yingxue Yao and Liang Zhou
L. Zhou et al., "Development of Differential Capacitive Displacement Sensor Based on RC Multi-Oscillating Circuit", Applied Mechanics and Materials, Vols. 10-12, pp. 643-646, 2008