Development of Differential Capacitive Displacement Sensor Based on RC Multi-Oscillating Circuit

L. Zhou; H.B. Zhang; Qiang Liu

doi:10.4028/www.scientific.net/AMM.10-12.643

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 10-12Development of Differential Capacitive...

Development of Differential Capacitive Displacement Sensor Based on RC Multi-Oscillating Circuit

Abstract:

In order to meet the demands for high precise micro-displacement testing, a differential capacitive displacement sensor based on RC multi-oscillating circuit was designed. It has two couples of polar plates, and gets the displacement by testing frequency through the multi-oscillating circuit. This capacitive sensor has many advantages such as simple structure and testing circuit, high resolution and good stability.