Nano-Displacement Measurement with Grating Interference
Nano-Grating measurement technology has been made great development in our country, for its unique advantage which isn’t available in laser interferometer. This paper presents a Nano-grating interferometer displacement measuring system based on double diffraction grating and Semiconductor laser light source, analyzes the error origin of the system in detail and uses error correction and compensation method to improve the measurement accuracy. The experimental result indicated that the system does have stable interferometer, high signal contrast, and easy adjusted optical path, further more the system with a strong environmental adaptability and compact structure. Under 20mm range and 50mm/sec measurement speed, the system’s measuring repeatability is below 30nm.
M. L. Jiang et al., "Nano-Displacement Measurement with Grating Interference", Applied Mechanics and Materials, Vol. 103, pp. 35-40, 2012