Nano-Displacement Measurement with Grating Interference

Min Lan Jiang; Fu Peng Li; Xiao Dong Wang

doi:10.4028/www.scientific.net/AMM.103.35

Paper Titles

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Designing Multisine Excitations for Measurement of Modern Wireless Communication System
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An Evaluation Method of Roundness Error Based on Artificial Bee Colony Algorithm
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Nano-Displacement Measurement with Grating Interference
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 103Nano-Displacement Measurement with Grating...

Nano-Displacement Measurement with Grating Interference

Abstract:

Nano-Grating measurement technology has been made great development in our country, for its unique advantage which isn’t available in laser interferometer. This paper presents a Nano-grating interferometer displacement measuring system based on double diffraction grating and Semiconductor laser light source, analyzes the error origin of the system in detail and uses error correction and compensation method to improve the measurement accuracy. The experimental result indicated that the system does have stable interferometer, high signal contrast, and easy adjusted optical path, further more the system with a strong environmental adaptability and compact structure. Under 20mm range and 50mm/sec measurement speed, the system’s measuring repeatability is below 30nm.

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Periodical:

Applied Mechanics and Materials (Volume 103)

Pages:

35-40

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.103.35

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Online since:

September 2011

Authors:

Min Lan Jiang, Fu Peng Li, Xiao Dong Wang

Keywords:

Displacement Measurement, Error, Grating Interferometer, Nanometer

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