Study of the Light Source Affects the Second Order Moiré Fringe Quality of Nano-Grating

Abstract:

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Two groups of indicator grating and scale grating produce two groups of first order Moiré fringe. Two groups of first order Moiré fringe interfere and produce second order Moiré fringe, and then by signal measurement and subdivide to the second order Moiré fringe, we can achieve nanometer accuracy. In which, the quality of the second order Moiré fringe has important influence on the quality of the nano-grating quality. In the second order Moiré fringe formation process, the characteristic of light source, the manufacture and assembling accuracy of scale grating and indicator grating and optical system, interference and noise etc. have an important influence on the quality of the second order Moiré fringe. This paper study the change of light source properties which formed the second order Moiré fringe to the quality of the second order Moiré fringe based on Lighttools software simulation. In order to provide a theoretical evidence for optimize design of the light source.

Info:

Periodical:

Edited by:

Qiancheng Zhao

Pages:

57-62

DOI:

10.4028/www.scientific.net/AMM.103.57

Citation:

X. S. Ma et al., "Study of the Light Source Affects the Second Order Moiré Fringe Quality of Nano-Grating", Applied Mechanics and Materials, Vol. 103, pp. 57-62, 2012

Online since:

September 2011

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Price:

$35.00

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