Key Technologies Related to High Vacuum Dry Pump

Jie Li; Shu Yi Gan; Ping Liang; Jia Xin Dai; Da Peng Chen; Teng Zhao

doi:10.4028/www.scientific.net/AMM.130-134.1696

Paper Titles

Numerical Analysis of Spraying Hole Improving Permeability and its Application in Outbursting Coal Seam
p.1676

Compound-Fault Diagnosis of Bearing Based on Order Tracking Wavelet Packet and Rough Sets
p.1681

3D Numerical Simulation of Fluid Flow and Heat Transfer for Asymmetric Spiral-Gear Inserts in a Tube
p.1686

The Impact of Balance Hole Radial Position of Centrifugal Pump on Axial Force and External Characteristics
p.1691

Key Technologies Related to High Vacuum Dry Pump
p.1696

A New Design for Liquid Mixing System
p.1700

Numerical Simulation on Flow Structure of a Steam-Jet Pump Influenced by Primary Nozzle Geometries
p.1703

Recycling Experimental Research of Thermosetting Phenolic Plastic Waste Based on Mechanical Effects
p.1708

Experimental Study of Mechanical Properties of Fiber of Deep-Sea Mooring Cables
p.1712

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Key Technologies Related to High Vacuum Dry Pump

Key Technologies Related to High Vacuum Dry Pump

Abstract:

High vacuum dry pump is a typical technology-intensive mechatronics product. It is mainly composed of a specially designed gas-pumping structure and a set of very complicated electronic control system. Taking place the conventional dry pump unit, this pump can used in many hi-tech area such as semiconductor industry where oil-free high vacuum is needed. This paper introduces two types of dry pump, including their structures and performances. Some key points related to the development of the pump are intensely discussed as well.

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Periodical:

Applied Mechanics and Materials (Volumes 130-134)

Pages:

1696-1699

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.130-134.1696

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Online since:

October 2011

Authors:

Jie Li, Shu Yi Gan, Ping Liang, Jia Xin Dai, Da Peng Chen, Teng Zhao

Keywords:

Dry Pump, Exhausting to Atmosphere, High Vacuum Pump, Magnetic Bearing

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