Luminescent Property of Al2O3:Ce3+ Thin Films

Shao Feng Yan; Kai Ge Miao

doi:10.4028/www.scientific.net/AMM.130-134.23

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 130-134Luminescent Property of Al2O3:Ce3+ Thin Films

Luminescent Property of Al₂O₃:Ce³⁺ Thin Films

Abstract:

The Al₂O₃ films doped with Ce^{3 +} were deposited on slides by the medium-frequency reaction magnetron sputtering process, to which the power is constant, Ar flow rate 70 sccm, O₂ flow rate 25~45sccm and sputtering time 90min at room temperature. The relationship between the luminescent properties of Al₂O₃:Ce^{3 +} films and the doped amount of Ce^{3 +} in the films was studied. The presence of Ce^{3 +} and stoichiometry of those films were determined. It was observed that the total luminescence intensity increases and the peak positions are strongly dependent on Ce³⁺concentration in the films. The analysis of luminescent excitation spectra showed that the luminance is due to the Ce³⁺ concentration in the cerium chloride aggregate formed in the films.

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Periodical:

Applied Mechanics and Materials (Volumes 130-134)

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23-26

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https://doi.org/10.4028/www.scientific.net/AMM.130-134.23

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Online since:

October 2011

Authors:

Shao Feng Yan, Kai Ge Miao

Keywords:

Al₂O₃Thin Films, Magnetron Sputtering, Photoluminescence (PL), Rare Earth (RE)

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