An Entropy Based Analytical Model for Thermoelastic Damping in Micromechanical Resonators

Yong Peng Tai; Pu Li; Wan Li Zuo

doi:10.4028/www.scientific.net/AMM.159.46

Paper Titles

A Review on Fuzzy Control Charts for Monitoring Attribute Data
p.23

A Study on Corrosion Resistance and Weatherability of Fluorocarbon Anti-Corrosion Coatings for External Surface of Ocean Platform
p.29

A Study on the Mechanical Properties of Polymer-Ceramic Composite Using Injection Moulding
p.35

An Enhanced Resolution Three-Dimensional Transformation Method Based on Discrete Wavelet Transform
p.41

An Entropy Based Analytical Model for Thermoelastic Damping in Micromechanical Resonators
p.46

An Improved Ant Colony Optimization for Large-Scale Simple Assembly Line Balancing Problem of Type-1
p.51

An Investigation into Machining Characteristics of Commercially Pure Titanium (Grade-2) Using CNC WEDM
p.56

Antistatic TPU/PA6 Blends Prepared by Blending Modification
p.69

Based on SolidWorks COSMOS 2.5 Tons, 4m•s^-1 High Speed the Elevator Drive's Finite Element Analysis
p.74

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 159An Entropy Based Analytical Model for...

An Entropy Based Analytical Model for Thermoelastic Damping in Micromechanical Resonators

Abstract:

In this paper, we present an analytical model for thermoelastic damping (TED) in micromechanical resonators, which is based on entropy generation, a thermodynamic parameter measuring the irreversibility in heat conduction. The temperature field of thin beam with small vibration is obtained by solving governing equations of linear thermoelasticity. The analytical solution is derived from the entropy generation equation. This method of entropy generation can provide an accurate estimation of the quality factor in flexural resonators. The results are compared with Zener’s approximation and LR (Lifshitz and Roukes) method. It is shown that the analytical model described in this paper is valid to estimate the quality factor due to thermoelastic damping.

You might also be interested in these eBooks

Advanced Manufacturing Technology and Systems

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volume 159)

Pages:

46-50

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.159.46

Citation:

Cite this paper

Online since:

March 2012

Authors:

Yong Peng Tai, Pu Li, Wan Li Zuo

Keywords:

Entropy, MEMS, Quality Factor, Resonator, Thermoelastic Damping

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] Ron Lifshitz and M. L. Roukes, Thermoelastic damping in micro- and nanomechanical systems, Phys. Rev. B. 61(8) (2000) 5600-5609.

DOI: 10.1103/physrevb.61.5600

Google Scholar

[2] Sudipto K. De and N. R. Aluru, Theory of thermoelastic damping in electrostatically actuated microstructures, Phys. Rev. B. 74(14) (2006) 144305(13).

DOI: 10.1103/physrevb.74.144305

Google Scholar

[3] Saurabh A. Chandorkar et al, Multimode thermoelastic dissipation, J. Appl. Phys. 105 (2009) 043505(13).

Google Scholar

[4] Rob N. Candler et al, Impact of Geometry on thermoelastic Dissipation in Micromechanical Resonant Beams, J. Microelectromech. Syst. 15(4) (2006) 927-934.

DOI: 10.1109/jmems.2006.879374

Google Scholar

[5] C. Zener, Internal Friction in Solids, I. Theory of Internal Fraction in Reeds, Phys. Rev. 52 (1937) 230-235.

DOI: 10.1103/physrev.52.230

Google Scholar

[6] C. Zener, Internal Friction in Solids, II. General Theory of Thermoelastic Internal Friction, Phys. Rev. 53 (1938) 90-99.

DOI: 10.1103/physrev.53.90

Google Scholar

[7] J. E. Bishop and V. K. Kinra, Thermoelastic Damping of a Laminated Beam in Flexure and Extension, J. Reinforced Plastics And Composites 12 (1993) 0210-17.

DOI: 10.1177/073168449301200207

Google Scholar

[8] J. E. Bishop and V. K. Kinra, Elastothermodynamic Damping in Laminated Composites, J. Solids Structures 34(9) (1997) 1075-1092.

DOI: 10.1016/s0020-7683(96)00085-6

Google Scholar

[9] Sairam Prabhakar and Srikar Vengallatore, Theory of Thermoelastic Damping in Micromechanical Resonators With Two-Dimensional Heat Conduction, J. Microelectromech. Syst. 17(2) (2008) 494-502.

DOI: 10.1109/jmems.2008.916316

Google Scholar