Design and Testing of In-Plane MEMS High-g Accelerometer

Abstract:

μAiming at the demand of missile fuse and other weapons systems, a high-g piezoresistive accelerometer with two terminal fixed beam-mass structure which can measure in-plane acceleration was designed. The design and simulation were also performed using Matlab and ANSYS. The simulation results show that the sensitivity of the accelerometer of sensitive-axis is 0.1101μV/g, and the transverse sensitivity of accelerometer is eliminated effectively. The key parameters such as impact over-loading signal and sensitivity of in-plane accelerometer were tested by Master hammer and Hopkinson bar. The test results showed that the sensor can work with the impact acceleration up to 117,395.95 g and the sensitivity of the accelerometer is 0.1028μV/g.

• Periodical: Applied Mechanics and Materials (Volumes 220-223)
• Pages: 1857-1860
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.220-223.1857
• Online since: November 2012
• Authors: Yun Bo Shi, Rui Zhao, Jun Liu
• Keywords: High-G, In-Plane, MEMS Accelerometer, Piezoresistive

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