Research on a Novel Electrical Gear-Type Grating Sensor

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The design scheme of electrical gear-type time grating sensor is presented for both dynamic measurement and static measurement. This sensor consists of upper layer, middle layer and lower layer. Symmetric three-phase windings are wound around gears of these three layers, respectively, and winds of each layer are staggered by 1/3 pitch. Inductance coils of sensor are embed in slots in another single layer of framework. This structure ensures that the number of pole pairs and probes is half the number of slots to realize high precision measurement with machining of low precision spatial division and low cost. Experiment results show that the accuracy of electrical gear-type sensor can achieve ±2″with multi-polygon autocollimator.

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1307-1311

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November 2012

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© 2012 Trans Tech Publications Ltd. All Rights Reserved

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