Effect of Different Temperatures on Fabricating Silica Antireﬂective Coatings

Li Na Zhang; Rui Min Jin

doi:10.4028/www.scientific.net/AMM.271-272.251

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 271-272Effect of Different Temperatures on Fabricating...

Effect of Different Temperatures on Fabricating Silica Antireﬂective Coatings

Abstract:

Based on TEOS system and sol-gel process, together with catalysts, Antireﬂective coating films prepared by sol—gel on glass substrate have been processed by furnace thermal annealing (FA). the refractive index and thinkness of SiO2 film is exactly controlled. The films are characterized by ellipsometer and SEM respectively. The effect of different temperatures in these processions are found and discussed

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Applied Mechanics and Materials (Volumes 271-272)

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251-254

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.271-272.251

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Online since:

December 2012

Authors:

Li Na Zhang, Rui Min Jin

Keywords:

Antireﬂective Coating, Defferent Temperatures, Furnace Thermal Annealing

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References

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