Research of MOEMS Pressure Sensor

De En; Chang Sheng Zhou; Huang He Wei; Na Na Wei; Xiao Long Shi

doi:10.4028/www.scientific.net/AMM.273.524

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 273Research of MOEMS Pressure Sensor

Research of MOEMS Pressure Sensor

Abstract:

In recent years, with the development of optical communication by leaps and bounds, promote the Micro-opto-electro-mechanical system (MOEMS) development. As a new technology, the MOEMS have been widely used in optical communication, optical switching, data storage, optical sensing and etc.. Compared with the traditional pressure sensors, the optical pressure sensor based on MOEMS has some unique advantages. In this paper, the structures, operation principles and fabrication processes of various MOEMS pressure sensors are described mainly. Finally, the structure and Key technology of a MOEMS pressure sensor array is presented in brief.

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Periodical:

Applied Mechanics and Materials (Volume 273)

Pages:

524-527

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.273.524

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Online since:

January 2013

Authors:

De En, Chang Sheng Zhou, Huang He Wei, Na Na Wei, Xiao Long Shi

Keywords:

MOEMS, Optical Sensing, Pressure Sensor

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