Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage

Van Tsai Liu

doi:10.4028/www.scientific.net/AMM.284-287.1788

Paper Titles

Bayesian Estimation Algorithm Applying in Gas Detection Modules
p.1764

Blowers of Vacuum Cleaners Utilizing Coreless and Sensorless Axial-Flux Motors with Edge-Wire Coils
p.1770

Control and Response Characteristics of a Mixed Mode MR Damper for a Multi-Story Structure
p.1778

Control Hardware Design of a Robotic Follow Spot System
p.1783

Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage
p.1788

Design and Application of Low Cost Redundancy Interface for UAV Distributed Servo System
p.1794

Design and Experimental Results of a Quad-Rotor Control System
p.1799

Design and Performance Evaluation of Modular Electro-Mechanical Actuator
p.1806

Design for a Novel Electromagnetic Valve for Camless SI Engines
p.1811

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 284-287Cross-Coupling Controller for Five...

Cross-Coupling Controller for Five Degree-of-Freedom Coplanar Nanostage

Abstract:

The proposed approach is to design a tracking controller for five degree-of-freedom coplanar nanostage which can provide high precision applications. This study propose a viscoelastic creep model, it was modeled as a series connection of springs and dampers to describe the creep effect. Then, utilize a PI controller using Taguchi method to search the optimization parameters to suppress the tracking error. Finally, a cross-coupling control scheme is proposed to eliminate the contour error which is typical in dual-axes tracking control problem. The developed approaches are numerically and experimentally verified which demonstrate performance and applicability.

You might also be interested in these eBooks

Innovation for Applied Science and Technology

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 284-287)

Pages:

1788-1793

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.284-287.1788

Citation:

Cite this paper

Online since:

January 2013

Authors:

Van Tsai Liu

Keywords:

Coplanar Nanostage, Creep Effect, Cross-Coupling Controller, Taguchi Method

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] K. Kuhnen and H. Janocha, Operator-based Compensation of Hysteresis, Creep and Force-dependence of Piezoelectric Stack Actuators, Proc. of the 1st IFAC-Conf. on Mechatronic Systems, pp.421-426, (2000).

DOI: 10.1016/s1474-6670(17)39178-4

Google Scholar

[2] K. Kuhnen, Modelling, Identification, and Compensation of Complex Hysteretic and log (t)-Type Creep, Control and Intelligent Systems, vol. 33, pp.134-147, Febr (2005).

DOI: 10.2316/journal.201.2005.2.201-1420

Google Scholar

[3] D. Croft, G. Shed and S. Devasia, Creep, Hysteresis, and Vibration Compensation for Piezoactuators-Atomic Force Microscopy Application, Journal of Dynamic Systems, Measurement, and Control, Vol. 123, N0. 1 pp.35-43, (2001).

DOI: 10.1115/1.1341197

Google Scholar

[4] H. Zhou, K. K. Tan and T. H. Lee, Micro-Positioning of Linear Piezoelectric Motors Based on a Learning Nonlinear PID Controller, Proceedings of 39th IEEE Conference of Decision and Control Sydney, pp.913-918, (2000).

DOI: 10.1109/cdc.2000.912889

Google Scholar

[5] Y. Koren and Lo Ch. -Ch. , Variable-Gain Cross-Coupling Controller for Contouring, Annals of the Crip, Vol. 40, pp.371-374, (1991).

DOI: 10.1016/s0007-8506(07)62009-5

Google Scholar