Micro Pressure, Temperature and Flow Sensors for Integration in Micro Methanol Reformer

Chi Yuan Lee; Shuo Jen Lee; Yen Ting Cheng; Yu Ming Chang

doi:10.4028/www.scientific.net/AMM.284-287.1872

Paper Titles

Fast Development of Flexible Motor Control System with Model Based Design
p.1851

Force and Position Control of the Pneumatic Cylinders through a Microscope with a CCD Camera
p.1856

Improving the Accuracy of Depth Estimation in Binocular Vision for Robotic Applications
p.1862

Mechatronic System Design for Science/Work Class ROV
p.1867

Micro Pressure, Temperature and Flow Sensors for Integration in Micro Methanol Reformer
p.1872

Motion Planning of Multiple Pattern Formation for Mobile Robots
p.1877

New Fault-Tolerant Scheme for Flight Control System of Unmanned Aerial Vehicles
p.1883

Panda Robot: Kinematic Design and Simulation for Quadrupedal Walking
p.1888

Passivity-Based Parameter Estimation and Position Control of Induction Motors via Composite Adaptation
p.1894

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 284-287Micro Pressure, Temperature and Flow Sensors for...

Micro Pressure, Temperature and Flow Sensors for Integration in Micro Methanol Reformer

Abstract:

In recent years, the development of fuel cells has proceeded rapidly, and so the reforming of methanol to produce hydrogen has become a serious problem. Supplying hydrogen from a micro methanol reformer to fuel cells is an important topic. The structure of a micro flow channel must support the transfer of external heat to the reform reaction, facilitating the diffusion of methanol vapor into the catalyst layer, increasing the rate of transfer of hydrogen. In this investigation, the micro-electro-mechanical systems (MEMS) technique is utilized to fabricate micro pressure, temperature and flow sensors. Polyimide film (PI) exhibits high temperature resistance and stress corrosion resistance, and is adopted herein as a flexible substrate. In future work, such micro sensors will be embedded in a micro methanol reformer for in-situ diagnosis.

You might also be interested in these eBooks

Innovation for Applied Science and Technology

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 284-287)

Pages:

1872-1876

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.284-287.1872

Citation:

Cite this paper

Online since:

January 2013

Authors:

Chi Yuan Lee, Shuo Jen Lee, Yen Ting Cheng, Yu Ming Chang

Keywords:

Flow Sensor, MEMS, Micro Methanol Reformer, Micro-Pressure, PI, Temperature

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] L.J. Minggu, W.R.W. Daud and M.B. Kassim: Int. J. Hydrogen Energy Vol. 35 (2010), p.5233.

Google Scholar

[2] N.A. Kelly and T.L. Gibson: Int. J. Hydrogen Energy Vol. 33 (2008), p.6420.

Google Scholar

[3] C. Brunetto, A. Moschetto and G. Tina: Elect. Power Syst. Res. Vol. 79 (2009), p.17.

Google Scholar

[4] T. Kim: Int. J. Hydrogen Energy Vol. 34 (2009), p.6790.

Google Scholar

[5] C.Y. Hsueh, H.S. Chu, W.M. Yan and C.H. Chen: Applied Energy Vol. 87 (2010), p.3137.

Google Scholar

[6] O.J. Kwon, S.M. Hwang, J.G. Ahn and J.J. Kim: J. Power Sources Vol. 156 (2006), p.253.

Google Scholar

[7] C.Y. Lee, S.J. Lee, C.C. Shen, C.T. Yeh, C.C. Chang and Y.M. Chang: Int. J. Hydrogen Energy Vol. 36 (2010), p.2869.

Google Scholar

[8] C.Y. Lee, S.J. Lee, C.C. Shen, C.T. Yeh, C.C. Chang and Y.M. Lo: Sensors Vol. 11 (2011), p.2246.

Google Scholar

[9] C.C. Chiang, C.K. Lin and M.S. Ju: Sensors and Actuators A Vol. 134 (2007), p.382.

Google Scholar

[10] D.W. Lee and Y.S. Choi: Microelectronic Engineering Vol. 85 (2008), p.1054.

Google Scholar

[11] G. Koley, J. Liu, M.W. Nomani, M. Yim, X. Wen and T.Y. Hsia: Materials Science and Engineering C Vol. 29 (2009), p.685.

Google Scholar

[12] Mechanical Microsensors, edtied by M. Elwenspoek and R. Wiegerink, Springer (2001).

Google Scholar

[13] L.V. King, Proc. Roy. Soc. London A. Vol. 90 (1914), p.563.

Google Scholar