Field Distortion Compensation for Galvanometric Scanning Machines

Abstract:

The laser manufacture has been widely used in micro-machining as a burgeoning technology. Galvanometric scanning systems is an important component in laser machines, but the galvanometric scanning system is usually combines the image field distortion that is from the mechanism and optical devices. The paper has presented a novel correction algorithm based on ride regression method for compensates the image field distortion. And the Euclidean distance error and the maximum error are 0.0422 and 0.09, respectively. This novel correction technique can effectively increase the accuracy of laser spot position and can further improve the performance of the galvanometric scanning system.

• Periodical: Applied Mechanics and Materials (Volumes 284-287)
• Pages: 2746-2750
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.284-287.2746
• Online since: January 2013
• Authors: Chin Sheng Chen, Wei Ke Wang, Chien Liang Huang, Chun Wei Yeh
• Keywords: Galvanometric Scanning Systems, Image Field Distortion, Ride Regression

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