Measurement of Radius of Curvature by Coordinate Measurement Machine

Abstract:

Radius of curvature is one of the key parameters of optical components. A variety of methods have been developed for this measurement. This paper describes a novel way, named “CMM spherometry by probe compensation”, to measure the radius of curvature of optical surfaces by coordinate measuring machine (CMM). The measurement combines CMM measurement and iteration calculation scheme is presented. The measurement results of CMM and the trace samples are compared. The effect of temperature compensation is discussed.

• Periodical: Applied Mechanics and Materials (Volumes 284-287)
• Pages: 488-492
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.284-287.488
• Online since: January 2013
• Authors: Shenq Tsong Chang, Wei Cheng Lin, Ting Ming Huang, Ming Ying Hsu, Po Hsuan Huang
• Keywords: CMM, Probe Compensation, Radius of Curvature, Temperature Compensation

References

[1] D. Malacara: Optical Shop Testing, Wiley, New York (1978), p.460–464. Dj.M. Maric, P.F. Meier and S.K. Estreicher: Mater. Sci. Forum Vol. 83-87 (1992), p.119.

[2] J.H. Burge, S. Benjamin, D. Caywood, C. Noble, M. Novak, C. Oh, R. Parks, B. Smith, P. Su, M. Valente, C. Zhao: Fabrication and testing of 1. 4-m convex off-axis aspheric optical surfaces, Proc. of SPIE Vol. 7426, 74260L-1 (2009).

DOI: 10.1117/12.828513

[3] C.V. Drysdale: Trans. Opt. Soc. London 2, 1 (1900).Y. Mishing, in: Diffusion Processes in Advanced Technological Materials, edtied by D. Gupta Noyes Publications/William Andrew Publising, Norwich, NY (2004), in press.

[4] W.H. Steel and D.B. Noack: Measuring the radius of curvature of soft corneal lenses, Appl. Opt. 16, 778-779 (1977).

DOI: 10.1364/ao.16.000778

[5] M.C. Gerchman, G.C. Hunter: Differential technique for accurately measuring the radius of curvature of long radius concave optical surfaces, Proc. SPIE 192, 75 (1979).

DOI: 10.1117/12.957839

[6] L.A. Selberg: Radius measurement by interferometry, Opt. Eng. 31, 1961 (1992)P.G. Clem, M. Rodriguez, J.A. Voigt and C.S. Ashley, U.S. Patent 6, 231, 666. (2001).

[7] C. Zhao, R. Zehnder and J.H. Burge: Measuring the radius of curvature of a spherical mirror with an interferometer and a laser tracker, Opt. Eng. 44, 090506-1 (2005).

DOI: 10.1117/1.2047594

[8] J. Li, Y.K. Wu, C. Sun: Improved long radius of curvature measurement system for FEL mirrors, Proceedings of 2005 Particle Accelerator Conference (2005), p.1787, Tennessee.

DOI: 10.1109/pac.2005.1590913

[9] N. Machkour-Deshayes, J. Stoup, Z.Q. John Lu, J. Soons, U. Griesmann and R. Polvani: J. Res. Natl. Inst. Stand. Technol. 111, 373 (2006) Information on http: /www. weld. labs. gov. cn.

DOI: 10.6028/jres.111.027