Characterization of Nanostructured Titania Thin Film and its Application in Gas Sensor

Abstract:

In this paper, Nanostructured Titania (NST) was fabricated by aging titanium film in hydrogen peroxide solution. NST was analyzed and characterized using scanning electron microscope (SEM), X-ray photoelectron spectroscopy (XPS), energy-dispersive X-ray spectroscopy (EDX), X-ray diffraction (XRD), nano-indentation method and the BET method. Results showed that NST was porous TiO2 with pore diameter of 90-133 nm, hardness of 1.35Gpa, and specific surface area of 37.26 m2/g. Gas sensors using NST film as sensitive material were presented in this paper too. Electrodes were deposited upon NST patterns to create electrical connections. Gas sensors with a simple package were successfully fabricated.

• Periodical: Applied Mechanics and Materials (Volume 289)
• Pages: 45-51
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.289.45
• Online since: February 2013
• Authors: Guan Rong Tang, Jing Chen
• Keywords: Characterization, Gas Sensor, Nanostructured Titania, Thin Film

References

[1] Z. A. Samah, Integration of Nanostructured Titania into microsystems, Ph.D., Materials, University of California, Santa Barbara, USA, (2005).

[2] X. Huang, R. W. Pascal, K. Chamberlain, C. J. Banks, M. Mowlem, and H. Morgan, A Miniature, High Precision Conductivity and Temperature Sensor System for Ocean Monitoring, Sensors Journal, IEEE, vol. 11, pp.3246-3252, (2011).

DOI: 10.1109/jsen.2011.2149516

[3] H. Tang, K. Prasad, R. Sanjinés, and F. Lévy, TiO2 anatase thin films as gas sensors, Sensors and Actuators B: Chemical, vol. 26, pp.71-75, (1995).

DOI: 10.1016/0925-4005(94)01559-z

[4] O. K. Varghese, D. Gong, M. Paulose, K. G. Ong, E. C. Dickey, and C. A. Grimes, Extreme Changes in the Electrical Resistance of Titania Nanotubes with Hydrogen Exposure, Advanced Materials, vol. 15, pp.624-627, (2003).

DOI: 10.1002/adma.200304586

[5] Y. Cui, L. J. Lauhon, M. S. Gudiksen, J. Wang, and C. M. Lieber, Diameter-controlled synthesis of single-crystal silicon nanowires, Applied Physics Letters, vol. 78, p.2214, (2001).

DOI: 10.1063/1.1363692

[6] J. Kong, H. T. Soh, A. M. Cassell, C. F. Quate, and H. Dai, Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers, Nature, vol. 395, pp.878-881, (1998).

DOI: 10.1038/27632

[7] G. Tang, J. Chen, Fabrication of nanostructured titania thin film at low temperature, in The 9th International Conference on Solid-State and Integrated-Circuit Technology, Beijing, China, 2008, pp.2593-2596.

DOI: 10.1109/icsict.2008.4735103

[8] Z. A. Samah, Microfabricated Structures and Devices Featuring Nanostructured Titania Thin Film, Ph.D., University of California, Santa Barbara, USA, (2007).

[9] T. Choudhury, S. O. Saied, J. L. Sullivan, and A. M. Abbot, Reduction of oxides of iron, cobalt, titanium and niobium by low-energy ion bombardment, Journal of Physics D: Applied Physics, vol. 22, p.1185, (1989).

DOI: 10.1088/0022-3727/22/8/026

[10] D. Gonbeau, C. Guimon, G. Pfister-Guillouzo, A. Levasseur, G. Meunier, and R. Dormoy, XPS study of thin films of titanium oxysulfides, Surface Science, vol. 254, pp.81-89, (1991).

DOI: 10.1016/0039-6028(91)90640-e