MEMS Aided Design Method Based on 3D Features

Chang Fu Zhang; Li Juan Wang

doi:10.4028/www.scientific.net/AMM.29-32.2302

Paper Titles

Dual Extended Kalman Filter Based Momentum Wheel Identification
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Research on Design and Testing of a Novel Power Source for Hybrid Vehicles
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Laboratory Tests Study on the Power Dissipation Characteristics of Conductor Self-Damping and Aeolian Vibration Dampers
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Research on the Design of Motion Control System Based on a Novel 5-DOF PCMM
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MEMS Aided Design Method Based on 3D Features
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Low Cost AFDX End System Based on System on a Programmable Chip
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Software Design and Implement of Test System of a Certain Radar Transmitter Based on the 1553B Bus
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Manufacture Parameter Design of SMG Spiral Bevel Gears Based on Local Synthesis and Transmission Error Optimization
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Study of Magnetoelastic Torque Sensor for Cutting Processes Monitoring
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 29-32MEMS Aided Design Method Based on 3D Features

MEMS Aided Design Method Based on 3D Features

Abstract:

A new design method for surface micromachined devices is proposed to reduce process complexity and improve intuitiveness of traditional design method of mask-to-shape-to-function. In the method, solid geometric models of MEMS devices are efficiently built up by selecting 3D features from the established MEMS feature database. Mask and process flow can be automatically generated with the developed aided design system based on SolidWorks. A practical example shows that the design method can shorten design cycle and improve design success rate.