MEMS Aided Design Method Based on 3D Features
A new design method for surface micromachined devices is proposed to reduce process complexity and improve intuitiveness of traditional design method of mask-to-shape-to-function. In the method, solid geometric models of MEMS devices are efficiently built up by selecting 3D features from the established MEMS feature database. Mask and process flow can be automatically generated with the developed aided design system based on SolidWorks. A practical example shows that the design method can shorten design cycle and improve design success rate.
C. F. Zhang and L. J. Wang, "MEMS Aided Design Method Based on 3D Features", Applied Mechanics and Materials, Vols. 29-32, pp. 2302-2307, 2010