PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

Yusuke Uchida; Satoshi Iizumi; Syungo Tomioka; Kyohei Tsujimoto; Kazuki Tomii; Tomohiro Matsuda; Saori Hagiwara; Syuntaro Miyake; Yasushiro Nishioka

doi:10.4028/www.scientific.net/AMM.300-301.912

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 300-301PZT Acoustic Energy Harvester Arrays with Dual Top...

PZT Acoustic Energy Harvester Arrays with Dual Top Electrodes

Abstract:

This paper presents the power generation performances of an array of three microelectromechanical system (MEMS) acoustic energy harvesters equiped with lead–zirconate–titanate (PZT) capacitors. The PZT acoustic energy harvesters had a diaphragm with a　diameter of 2 mm consisting of Al (0.1 μm) / PZT (1 μm) / Pt (0.1 μm) / Ti (0.1 μm) / SiO₂ (1.5 μm), and the diaphragm vibrations were excited by sound pressure. The arrayed peripheral energy harvester generated a maximum power of 2.26 × 10^-10 W at a sound pressure level (SPL) of 100 dB at 5 kHz. The output power of three arraying devices was about 3 times larger than that of the single devices.

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Periodical:

Applied Mechanics and Materials (Volumes 300-301)

Pages:

912-915

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.300-301.912

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Online since:

February 2013

Authors:

Yusuke Uchida, Satoshi Iizumi, Syungo Tomioka, Kyohei Tsujimoto, Kazuki Tomii, Tomohiro Matsuda, Saori Hagiwara, Syuntaro Miyake, Yasushiro Nishioka

Keywords:

Energy Harvester, PZT

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References

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