Structure Design of the Single-Axis Piezoelectric Actuated Stage Using a 4-9-9-14 Piezoelectric Actuator

Shann Chyi Mou

doi:10.4028/www.scientific.net/AMM.303-306.1661

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Structure Design of the Single-Axis Piezoelectric Actuated Stage Using a 4-9-9-14 Piezoelectric Actuator
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 303-306Structure Design of the Single-Axis Piezoelectric...

Structure Design of the Single-Axis Piezoelectric Actuated Stage Using a 4-9-9-14 Piezoelectric Actuator

Abstract:

In this paper, a novel piezoelectric actuator structure - 4-9-9-14 piezoelectric actuator is constructed, and it is made of piezoelectric buzzer to drive a piezoelectric actuated stage. The 4-9-9-14 piezoelectric actuator offers a better balanced capability of forward rotation and reverse rotation than the conventional edge-driving piezoelectric actuator. According to the rotational speed experiment, the CW/CCW ratio of the 4-9-9-14 piezoelectric actuator is probably 1:0.8. The movement of the pie-zoelectric actuated stage is read and analyzed by means of data acquisition card and LabVIEW software operating in conjunction with a linear encoder. In a natural environment, plenty of noise interferes with linear encoder signals and results in erroneous addition performed by a counter. Therefore, the LabVIEW program set forth the means of filtering and the method for retrieving a correct position signal.