Evaluation of Properties of FIB Deposited Metal Layer and Application to Temperature Sensing

Abstract:

In this paper, the properties of Focused-Ion-Beam (FIB) deposited platinum layer are investigated using the MEMS processes. First, the electrical properties are examined with three parallel metal lines and the measurement result shows over one hundred times larger resistivity than that of the conventional platinum layer. This feature is due to the additional materials like carbon compound and the gallium ion. The thermal properties are also investigated about the temperature coefficient of resistivity (TCR). The measured TCR values are -0.0015~-0.0020 K-1 which are different from the positive TCR in conventional platinum layer. The carbon compound has negative TCR and changes the properties of FIB metal layer. Although some non-uniform properties are observed, the properties of FIB deposited platinum layer are sufficient for the temperature sensing applications at small area.

• Periodical: Applied Mechanics and Materials (Volume 319)
• Pages: 54-57
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.319.54
• Online since: May 2013
• Authors: Dae Keun Choi, Sang Hoon Lee
• Keywords: Focused Ion Beam (FIB), MEMS, Temperature Coefficient of Resistivity (TCR), Temperature Sensing

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