Minimization of Total Processing Time in Semiconductor Photolithography Process

Abstract:

This paper focuses on a scheduling problem in photolithography process of semiconductor manufacturing. The photolithography equipment can be divided into three main parts, that is, scanner, spinner, and developer. Generally, in like manner to the other processes, the identical product types are processed at the same time in photolithography process since a certain amount of recipe change time is required whenever product type is changed. So, in this research, we consider multi-product production case with different processing times and flow recipes, and then attempt to reduce total processing time in photolithography process. From this research, we show that the total processing time can be minimized if we give a variety of input orders of lots and wafers.

• Periodical: Applied Mechanics and Materials (Volumes 325-326)
• Pages: 88-93
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.325-326.88
• Online since: June 2013
• Authors: You Jin Park, Ha Ran Hwang
• Keywords: Photolithography Process, Scheduling, Semiconductor, Total Processing Time

References

[1] L.M. Wein: Scheduling Semiconductor Wafer Fabrication, IEEE Vol. 1 (1988), p.115

[2] C.Y. Lee, R. Uzsoy and L.A. Martin-Vega: Evolving fuzzy rules for due-date assignment problem in semiconductor manufacturing, INFORMS Vol. 40 (1992), p.764

[3] D.S. Hochbaum and D. Landy: Scheduling Semiconductor Burn-In Operations to Minimize Total Flowtime, INFORMS Vol. 45 (1997), p.874

DOI: 10.1287/opre.45.6.874

[4] R. Uzsoy, C.Y. Lee and L.A. Martin-Vega: Scheduling semiconductor test operations: Minimizing maximum lateness and number of tardy jobs on a single machine, Naval Research Logistics Vol. 39 (1992), p.369

DOI: 10.1002/1520-6750(199204)39:3<369::aid-nav3220390307>3.0.co;2-f

[5] A.J. Pasadyn and T.F. Edgar: Observability and State Estimation for Multiple Product Control in Semiconductor Manufacturing, IEEE Vol. 18 (2005), p.592

DOI: 10.1109/tsm.2005.858505

[6] J.W. Fowler, D.T. Phillips and G.L. Hogg: Real-Time Control of Multiproduct Bulk-Service Semiconductor Manufacturing Processes, IEEE Vol. 5 (1992), p.158

DOI: 10.1109/66.136278

[7] Y.D. Kim, J.G. Kim, B.C. Choi and H.U. Kim: Production Scheduling in a Semiconductor Wafer Fabrication Facility Producing Multiple Product Types with District Due Dates, IEEE Vol. 17 (2001), p.589

DOI: 10.1109/70.964660

[8] Y.D. Kim, J.U. Kim, S.K. Lim and H.B. Jun: Due-Date Based Scheduling and Control Policies in a Multiproduct Semiconductor Wafer Fabrication Facility, IEEE Vol. 11 (1998), p.155

DOI: 10.1109/66.661295

[9] P.C. Chang, J.C. Hieh and T. W. Liao: Evolving fuzzy rules for due-date assignment problem in semiconductor manufacturing, Journal of Intelligent Manufacturing, Vol. 16 (2005), p.549

DOI: 10.1007/s10845-005-1663-4

[10] P.R. Kumar: Scheduling Semiconductor Manufacturing Plants, IEEE Vol. 14 (1994), p.33

[11] A. Arisha, P. Young and M. E. Baradie: A simulation model to characterize the photolithography process of a semiconductor wafer fabrication, Journal of Materials Processing Technology (2004), p.(2071)

DOI: 10.1016/j.jmatprotec.2004.04.387

[12] E. Akcali, K. Nemoto and R. Uzsoy: Cycle-Time Improvements for Photolithography Process in Semiconductor Manufacturing, IEEE Transactions on Semiconductor Manufacturing Vol. 14 (2001), p.48

DOI: 10.1109/66.909654

[13] Berman, F. J. Gurrola-Gal, A. Nozari, S. Sathaye and J.P. Sltarik: Performance Analysis Techniques for IC Manufacturing Lines, AT&T Technical Journal Vol. 4 (1986), p.46

DOI: 10.1002/j.1538-7305.1986.tb00465.x

[14] L.F. Atherton and R.W. Atherton in: Wafer Fabrication: Factory Performance and Analysis, chapter 2, Kluwer Academic Publishers (1995)

DOI: 10.1007/978-1-4613-1291-8_3

[15] M.C. Zhou and M.D. Jeng: Modeling, Analysis, Simulation, Scheduling, and Control of Semiconductor Manufacturing Systems: A Petri Net Approach, IEEE Vol. 11 (1998), p.333

DOI: 10.1109/66.705370