Research on the Micro Self-Vibration of Aerostatic Bearing with Pocketed Orifice Type Restrictor

Abstract:

In this paper, Computational Fluid Dynamics (CFD) is used to analyze the micro self-vibration of aerostatic bearing with pocketed orifice type restrictor as the bearings performance is stable and it is widely used ultra-precision equipments. By using Large Eddy Simulation (LES), time-variation flow field inside the bearing is obtained. Then the pressure fluctuation characteristics is discussed because it influences the micro self-vibration of the bearing directly. Moreover, the relationship between bearing diameter, orifice diameter, air chamber diameter, air chamber depth and the micro self-vibration is researched. The results can be considered for the designing of ultra-precision aerostatic bearing with pocketed orifice type restrictor.

• Periodical: Applied Mechanics and Materials (Volumes 333-335)
• Pages: 2076-2079
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.333-335.2076
• Online since: July 2013
• Authors: Hong Xia Zhu, Yingxiao Lin, Jing Yi Zhao
• Keywords: Aerostatic Bearing, Large Eddy Simulation, Micro Self-Vibration, Pressure Fluctuation

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