Key Fabrication Technology Research of Exploding Foil Initiator

Jun Jun Lv; Qing Xuan Zeng; Ming Yu Li; Qing Xia Yu

doi:10.4028/www.scientific.net/AMM.347-350.1207

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Key Fabrication Technology Research of Exploding Foil Initiator
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 347-350Key Fabrication Technology Research of Exploding...

Key Fabrication Technology Research of Exploding Foil Initiator

Abstract:

In order to realize consistency and low cost in the production process of the exploding foil initiator, the manufacturing method of exploding foil initiator was studied using micro processing technology. Microcrystalline glass was used as substrate, and magnetron sputtering,photolithography and wet etching technology were utilized to product the metal bridge foil on the surface of the substrate. SU-8 photoresist was used as the barrel material and scanning electron microscope was exploited to characterize structure of the initiator. Through the electrical tests, the flyer was successfully generated and after the barrel had a good integrity.

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Periodical:

Applied Mechanics and Materials (Volumes 347-350)

Pages:

1207-1210

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.347-350.1207

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Online since:

August 2013

Authors:

Jun Jun Lv, Qing Xuan Zeng, Ming Yu Li, Qing Xia Yu

Keywords:

Initiator, Micro-Electromechanical System (MEMS), SU-8 Photoresist

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