Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method

Abstract:

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A method for reducing the size and cost of optical system for precision measurement based on the Levitation Mass Method (LMM) is proposed. In the LMM, a mass levitated using a pneumatic linear bearing with sufficiently small friction is made to collide with the object being tested. The velocity and acceleration of the mass are measured using a compact optical interferometer. The size of the optical system can be drastically reduced by using a planar lightwave circuit (PLC), in which several optical elements are arranged on a planar surface of a silica or semiconductor substrate. Several applications of the PLC to precision measurement will be discussed.

Info:

Periodical:

Edited by:

Yusaku Fuji and Koichi Maru

Pages:

329-336

DOI:

10.4028/www.scientific.net/AMM.36.329

Citation:

K. Maru and Y. Fujii, "Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method", Applied Mechanics and Materials, Vol. 36, pp. 329-336, 2010

Online since:

October 2010

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$35.00

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