Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method
A method for reducing the size and cost of optical system for precision measurement based on the Levitation Mass Method (LMM) is proposed. In the LMM, a mass levitated using a pneumatic linear bearing with sufficiently small friction is made to collide with the object being tested. The velocity and acceleration of the mass are measured using a compact optical interferometer. The size of the optical system can be drastically reduced by using a planar lightwave circuit (PLC), in which several optical elements are arranged on a planar surface of a silica or semiconductor substrate. Several applications of the PLC to precision measurement will be discussed.
Yusaku Fuji and Koichi Maru
K. Maru and Y. Fujii, "Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method", Applied Mechanics and Materials, Vol. 36, pp. 329-336, 2010