Proposal of Compact Optical System Using Planar Lightwave Circuit for Precision Measurement Based on Levitation Mass Method

Abstract:

A method for reducing the size and cost of optical system for precision measurement based on the Levitation Mass Method (LMM) is proposed. In the LMM, a mass levitated using a pneumatic linear bearing with sufficiently small friction is made to collide with the object being tested. The velocity and acceleration of the mass are measured using a compact optical interferometer. The size of the optical system can be drastically reduced by using a planar lightwave circuit (PLC), in which several optical elements are arranged on a planar surface of a silica or semiconductor substrate. Several applications of the PLC to precision measurement will be discussed.

• Periodical: Applied Mechanics and Materials (Volume 36)
• Pages: 329-336
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.36.329
• Online since: October 2010
• Authors: Koichi Maru, Yusaku Fujii
• Keywords: Levitation Mass Method, Planar Lightwave Circuit, Precision Measurement

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