Research on Compensation of Nonlinearity in Heterodyne Interferometer
The demands of nano-measurement and nano-positioning now in research and industries become the challenge for heterodyne interferometer because its nonlinearity often limits the effective resolution. This paper introduces new developed method for compensation of the nonlinearity in heterodyne interferometer and explains what accuracy can be reached with demonstrations figured by the test results. On the basis of theoretical analyses and experimental investigations it shows which exactness can be expected.
Yusaku Fuji and Koichi Maru
W. M. Hou and X. Ren, "Research on Compensation of Nonlinearity in Heterodyne Interferometer", Applied Mechanics and Materials, Vol. 36, pp. 303-310, 2010