Research on Compensation of Nonlinearity in Heterodyne Interferometer

Abstract:

The demands of nano-measurement and nano-positioning now in research and industries become the challenge for heterodyne interferometer because its nonlinearity often limits the effective resolution. This paper introduces new developed method for compensation of the nonlinearity in heterodyne interferometer and explains what accuracy can be reached with demonstrations figured by the test results. On the basis of theoretical analyses and experimental investigations it shows which exactness can be expected.

• Periodical: Applied Mechanics and Materials (Volume 36)
• Pages: 303-310
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.36.303
• Online since: October 2010
• Authors: Wen Mei Hou, Xiao Ren
• Keywords: Heterodyne Interferometer, Nonlinearity, Polarisation

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