Research on Compensation of Nonlinearity in Heterodyne Interferometer

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The demands of nano-measurement and nano-positioning now in research and industries become the challenge for heterodyne interferometer because its nonlinearity often limits the effective resolution. This paper introduces new developed method for compensation of the nonlinearity in heterodyne interferometer and explains what accuracy can be reached with demonstrations figured by the test results. On the basis of theoretical analyses and experimental investigations it shows which exactness can be expected.

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Edited by:

Yusaku Fuji and Koichi Maru

Pages:

303-310

Citation:

W. M. Hou and X. Ren, "Research on Compensation of Nonlinearity in Heterodyne Interferometer", Applied Mechanics and Materials, Vol. 36, pp. 303-310, 2010

Online since:

October 2010

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$41.00

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