Preliminary Exploration on Control Theory of Ultraprecision Stage with Large Travel
With the development of science and manufacturing technology, the whole performance of precision machining stage system with high precision and high resolution directly influences the accuracy of precision and ultraprecision cutting process, fine measurement accuracy and GSI manufacturing level. Actually, linear motion of worktable refers to the linear motor movers positioning. The main contribution of this paper is the development of a mathematical model based on precision stage control system, in accordance with the principle of linear motor and PID control. The simulation results of unit-feedback position PID control, velocity PID control, position and velocity dual loop feedback control are presented and analyzed separately in SIMULINK toolbox of MATLAB to discuss the proposed control outcome in detail.
Yi-Min Deng, Aibing Yu, Weihua Li and Di Zheng
L. Shi and B. Lin, "Preliminary Exploration on Control Theory of Ultraprecision Stage with Large Travel", Applied Mechanics and Materials, Vols. 37-38, pp. 895-898, 2010