Piezoresistive and Mechanics Properties of Nanopolycrystalline Silicon Film Materials

Abstract:

The polycrystalline silicon films with same doping concentration and different thickness were prepared by low pressure chemical vapor deposition. The gauge factors of the films samples were tested, the results show that the piezoresistive properties of nanopolycrystalline silicon film (NPSF) exceed that of common polycrystalline silicon film (CPSF). To apply the NPSF to MEMS piezoresistive device effectively, the Youngs modulus of the NPSF were tested by in-situ nanomechanical test system, the results show that the Youngs modulus of the NPSF is about between 155GPa and 158GPa. It is very useful to investigate the piezoresistive and mechanics properties of NPSF, the results show that NPSF is a suitable material in MEMS piezoresistive device.

• Periodical: Applied Mechanics and Materials (Volumes 380-384)
• Pages: 4237-4240
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.380-384.4237
• Online since: August 2013
• Authors: Xue Bin Lu, Lin Hai Cui, Hai Huang
• Keywords: Gauge Factor, Nanopolycrystalline Silicon, Young's Modulus

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