Design and Electro-Thermal Analysis of a New Micro-Hotplate for Gas Sensor

Abstract:

Electro-thermal analysis of a new micro-hotplate designed for gas sensor has been studied in this paper. Through the comparison of materials, select pt as electrodes material, Si, SiO₂ as substrate materials. Then, through the optimization of substrate structure, in order to make the gas sensor obtain perfect properties of good temperature uniformity, the thickness of Si substrate, thermal insulation layers are 150, 50, 100 µm respectively. The new micro-hotplate structure is benefit for the improvement of sensitivity and overall performance of the sensor.

• Periodical: Applied Mechanics and Materials (Volume 389)
• Pages: 602-605
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.389.602
• Online since: August 2013
• Authors: Xiao Bo Zhang, Guo Guang Wang, Chang Bai Liu, Li Liu, Wei Wei Zhai, Lian Yuan Wang, Zhen Liu, Xiao Qing Bo, Xiao Chi
• Keywords: Electro-Thermal, Magnetic Field Distribution, Micro-Hotplate, Temperature Distribution

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