Design and Analysis of Hybrid Integrated High-Speed Mushroom Vertical PIN Photodetector

Ke Rui Zhang; Yong Qing Huang; Xiao Feng Duan

doi:10.4028/www.scientific.net/AMM.411-414.1455

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 411-414Design and Analysis of Hybrid Integrated...

Design and Analysis of Hybrid Integrated High-Speed Mushroom Vertical PIN Photodetector

Abstract:

We present a new high-speed drift-enhanced InGaAs/InP mushroom vertical PIN photodetector which is integrated on a GaAs/AlGaAs F-P filter cavity using an undercut mushroom mesa structure to significantly reduce both the detector RC constant and the parasitic capacitance. A 3dB bandwidth of 110 GHz and a quantum efficiency of 68% are simultaneously obtained at 1.55 μm wavelength.

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Periodical:

Applied Mechanics and Materials (Volumes 411-414)

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1455-1458

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.411-414.1455

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Online since:

September 2013

Authors:

Ke Rui Zhang, Yong Qing Huang, Xiao Feng Duan

Keywords:

Frequency Response, GaAs/AlGaAs F-P Filter Cavity, Mushroom-VPD

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References

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