Effect of the Temperature on Diamond-Like Carbon (DLC) Thin Film Based on LIS

Lei Huang; Jun Tang Yuan; Zhen Hua Wang; Bin Bin Yu

doi:10.4028/www.scientific.net/AMM.421.212

Paper Titles

The Design, Rapid Manufacture, and Materials of Artificial Porous Bone Structure
p.186

Microstructure Evolution of Ti-6Al-4V Alloy during High Speed Cutting: An Investigation Using Finite Element Simulation
p.193

Physical and Mechanical Properties of Fired Clay Bricks Incorporated with Cigarette Butts: Comparison between Slow and Fast Heating Rates
p.201

Influence of Roll Rotational Speed on inside Bore and Lamination Defects in Rotary Piercing Large Diameter Heavy Wall P92 Steel Pipe Process
p.205

Effect of the Temperature on Diamond-Like Carbon (DLC) Thin Film Based on LIS
p.212

Experimental Study and Influence Mechanism of the Properties of α-C:H Thin Film at Different Bias Voltages
p.217

Mirror Finishing Method of Electrochemical Polishing and Mechanical Grinding for Cold Rolling Rollers
p.222

The Verification of Material Plastic Flow at Optimal Warm Forging Temperature Using Computer Simulation
p.229

A Marginal Isolation Failure Caused by Thin Film Quality Issue Analysis in a 45nm Logic Process
p.235

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 421Effect of the Temperature on Diamond-Like Carbon...

Effect of the Temperature on Diamond-Like Carbon (DLC) Thin Film Based on LIS

Abstract:

Diamond-like carbon (DLC) thin films were deposited on YG6 cemented carbide by an anode-layer linear ion source (LIS). The effect of different temperatures (20°C, 80°C, 115°C and 150°C) on DLC thin films was investigatedby using atomic force microscope (AFM), scanning electron microscope (SEM) and Raman spectroscopy. It was found thatthe surface roughness of the film decreased at first and then increased with the increase of the temperature, and reached the trough at 80°C. The intensity ratio (I_D/I_G) and the adhesion of the film increased at first and then decreased, and both of them reached the peak at 80°C. When the temperature was 80°C, the surface roughness was 6.9nm, the intensity ratio (I_D/I_G) was1.91 and the critical failure load was 107.23N. The results show that the temperatures have a great effect on the surface morphology and mechanism properties of DLC thin films. Consequently, this paperfurther studied the effect mechanism of different temperatures on DLC thin films based on the experiment.