Study of Real-Time Measurement for Thickness of Coating Film Based on Quartz Crystal Oscillator

Xia Ma; Gao Fa He; Jian Bing Ren

doi:10.4028/www.scientific.net/AMM.421.449

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 421Study of Real-Time Measurement for Thickness of...

Study of Real-Time Measurement for Thickness of Coating Film Based on Quartz Crystal Oscillator

Abstract:

After the technologies of measurement for thin-film thickness were analyzed, the method of real-time measurement for coating thickness based on quartz crystal oscillation was proposed. The principle of the thickness measured by frequency shifting was analyzed on theory, the functional relationship between the resonant frequency shifting and the film thickness changing was deduced. Aim at the complicated working condition in coating machine, the structure of the measuring system for reducing the influence from external pressure and temperature was designed. The circuit for detecting the frequency shift was designed. Final, according to the experiment result, the resolution of thickness measurement can achieve sub-micrometer level.

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Periodical:

Applied Mechanics and Materials (Volume 421)

Pages:

449-452

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.421.449

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Online since:

September 2013

Authors:

Xia Ma, Gao Fa He, Jian Bing Ren

Keywords:

On-Line Measurement, Coating, Crystal Oscillation, Thin-Film Thickness

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References

[1] Zhan Meiqiong, Zhang Dongping , Yang Jian, He Hongbo et al. Thickness Monitoring by Quartz Crystal Oscillation for Optical Coatings [J]. ACTA PHOTONICA SINICA, 2004, 33(5): 585-588. (in Chinese).

Google Scholar

[2] Bernhard Gollas, Joanne M Elliott, and Philip N Bartlett. Electrodeposition and properties of nanostructured platinum films studied by quartz crystal impedance measurements at 10 MHz[J]. Electrochemical Acta, 2000, 45: 3711-3724.

DOI: 10.1016/s0013-4686(00)00464-3

Google Scholar

[3] Abdul Wajid. On the accuracy of the quartz-crystal microbalance (QCM) in thin-film depositions[J]. Sensor and Actuators A 1997, 63: 41-46.

DOI: 10.1016/s0924-4247(97)80427-x

Google Scholar

[4] Ji Hongzhen, Zou Juanjuan, Cui Baoshuang. An On-line accurate measurement method for nano film thickness [J]. Infrared, 2011, 32(7): 9-16. (in Chinese).

Google Scholar