Effect of Laser Fluence on the Growth of Mo Films Prepared by a Pulsed Laser Deposition Method

Abstract:

Molybdenum films with flat and smooth surfaces were prepared on Si (100) substrates using a pulsed laser deposition method. results indicate that increased laser fluence results in narrower diffraction peak, higher surface roughness, and transition from amorphous state into polycrystalline state with gradually increased grain size. The growth mechanism of the films and the effects of particle energy on the growth of the films are discussed based on an analysis of the changes in the crystallization process with laser fluence.

• Periodical: Applied Mechanics and Materials (Volumes 423-426)
• Pages: 780-783
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.423-426.780
• Online since: September 2013
• Authors: Jie Hong Lei
• Keywords: Atomic Force Microscopy (AFM), Laser Deposition, Metals, Surface Properties, Thin Film, X-Ray Diffraction (XRD)

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