Numerical Simulation of MEMS Stirling Cooler

Abstract:

The heat transfer and the fluid dynamics characteristics of subsonic gas flows through micro-channels are examined using numerical method. Detailed analysis on the Stirling MEMS device has been examined for the feasibility of the performance. The 1-D Stirling engine design code was utilized to provide basic information to meet the design parameters and criteria. Furthermore a 2-D CFD code has been used to perform a detailed analysis. The simulation results show that the numerical method used here could be used for the prediction of MEMS performance before experimental test and manufacture process start.

• Periodical: Applied Mechanics and Materials (Volumes 44-47)
• Pages: 924-928
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.44-47.924
• Online since: December 2010
• Authors: Wen Song, Xian Zhou Wang, Lei Yue, Zhi Guo Zhang
• Keywords: Cooler, Micro-Electromechanical System (MEMS), Numerical Method, Stirling Cycle

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