Numerical Simulation of MEMS Stirling Cooler
The heat transfer and the fluid dynamics characteristics of subsonic gas flows through micro-channels are examined using numerical method. Detailed analysis on the Stirling MEMS device has been examined for the feasibility of the performance. The 1-D Stirling engine design code was utilized to provide basic information to meet the design parameters and criteria. Furthermore a 2-D CFD code has been used to perform a detailed analysis. The simulation results show that the numerical method used here could be used for the prediction of MEMS performance before experimental test and manufacture process start.
W. Song et al., "Numerical Simulation of MEMS Stirling Cooler", Applied Mechanics and Materials, Vols. 44-47, pp. 924-928, 2011