The Study of Acceleration Effect for Piezoresistive Micro Pressure Sensor

Abstract:

This paper reports the acceleration effect of a type of piezoresistive pressure sensor for micro-pressure measurement with a cross beam-membrane (CBM) structure. By using the finite element method (FEM) to analyze the stress distribution of the CBM structure and compared with the traditional structures under acceleration signals. Our results show that the sensitivity and linearity of the CBM is better than other structures, but also the acceleration disturb analysis indicating that the CBM structure offers low acceleration interference for micro-pressure measurement in vibration environments.

• Periodical: Applied Mechanics and Materials (Volume 455)
• Pages: 455-459
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.455.455
• Online since: November 2013
• Authors: Bian Tian*, Yu Long Zhao, Zhe Niu
• Keywords: Lateral Effect, Micro Pressure, Piezoresistive

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DOI: 10.1109/84.809067