Fabrication High Aspect Ratio Nanometer Holes on the Alumina Based on Self-Organization Technology

Abstract:

In this paper, a nanofabrication technology of alumina self-organization method for deep and self-arranged nanometer holes on high purity aluminum is presented. Deep and self-arranged nanometer holes can be used as antireflection structures, polarizing elements, guided-mode resonance filters and high efficiency diffraction optical elements. The fabrication technology provided an effective method for low-cost, large-scale manufacturing high aspect ratio nanoholes.The deep nanoholes structure is fabricated by two anodizing processes on aluminum. The theoretical calculation of reflectivity for the fabricated deep holes G-solver sofeware while the measurement setup for the reflectivity of the deep nanoholes is self-made optical parameter test system.The results show that the calculated reflectivity of the deep holes is below 8.0% within the visible wavelength range, while the measured reflectivity of the fabricated nanometer holes is under 8.30% within the wavelength range of 400-760nm and it agrees well with the theoretical analysis result.

• Periodical: Applied Mechanics and Materials (Volume 472)
• Pages: 725-728
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.472.725
• Online since: January 2014
• Authors: Yi Gui Li*, Ling Han Li, Susumu Sugiyama, Jing Quan Liu
• Keywords: Deep Nanometer Holes, Self-Organization Technology, Self-Organized Alumina

References

[1] D. V McAllister, M. G Allen and M. R Prausnitz: Annu. Rev. Biomed. Eng Vol. 2 (2000), p.289.

[2] H. J Gardeniers, R Luttge and E. J Berenschot: J. MEMS Vol. 12 (2003), p.855.

[3] S. Herry,D. McAllister and M.G. Allen: J Pham Sci Vol. 87(1998), p.922.

[4] S. P Davis, B. J Landis and Z. H Adams: J. Biomech Vol. 37 (2004), p.1155.

[5] N. Matsuzuka, Y. Hirai and O. Tabata: J. Micromech. Microeng Vol. 15(2005), p. (2056).

[6] S. Sugiyama,K. Sommawan and G. Kawaguchi: J. Micromech. Microeng Vol. 14(2004), p.1399.