Stability and Dynamic Analysis of the Electrostatic MEMS Actuators

Abstract:

The nonlinear dynamic behavior of the micro actuators is analyzed in this paper. In general, analysis of the electrostatic device is quite difficult and complicated due to the electrostatic coupling effect and the nonlinear electrostatic force. In this study, a hybrid method for the micro-structure system, which combines the differential transformation and finite difference approximation techniques, is used to overcome the nonlinear electrostatic coupling phenomenon. The analysis takes account of the electrostatic coupling effect, the fringing field effect, the residual stress, the nonlinear electrostatic force and squeeze-film damping effect. Finally, the actuating conditions which ensure the stability of the micro actuators are identified by reference to phase portraits.

• Periodical: Applied Mechanics and Materials (Volumes 479-480)
• Pages: 431-435
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.479-480.431
• Online since: December 2013
• Authors: Chin Chia Liu
• Keywords: Electrostatic Actuator, Hybrid Method, MEMS, Micro-Beam, Pull-In Voltage, Squeeze Film Damping Effect

References

[1] N.I. Maluf, et al.: High-voltage devices and circuits fabricated using foundry CMOS for use with electrostatic MEM actuators, Sens. Actuators A 52 (1996), pp.187-192.

DOI: 10.1016/0924-4247(96)80147-6

[2] Rajesh Luharuka, et al.: Simulated and experimental dynamic response characterization of an electromagnetic microvalve, Sensors and Actuators A (2007).

[3] J. Olivares, et al.: Piezoelectric actuation of microbridges using AlN, Sensors and Actuators A 123–124 (2005), p.590–595.

DOI: 10.1016/j.sna.2005.03.066

[4] P.M. Osterberg and S.D. Senturia: M-test: a test chip for MEMS material property measurement using electrostatically actuated test structures, J. Microelectromech. Syst. 6 (2) (1997), p.107–118.

DOI: 10.1109/84.585788

[5] R. Legtenberg, et al.: Electrostatic curved electrode actuators, J. Microelectromech. Syst. 6 (3) (1997), p.257–265.

DOI: 10.1109/84.623115

[6] M.A. Gretillat and Y.J. Yang and E.S. Hung, V. Rabinvich and G.K. Ananthasuresh, N.F. Rooij and S.D. Senturia: Nonlinear electromechanical behavior of an electrostatic microrelay, In Proe. of the International Conf. On Solid-State and Actuators, (Transducers '97), Chicago, IL, (1997).

DOI: 10.1109/sensor.1997.635406

[7] E.S. Hung and S.D. Senturia: Extending the travel range of analog-tuned electrostatic actuators, J. Microelectromeehanieal Systems 8 (4) (1999), pp.497-505.

DOI: 10.1109/84.809065

[8] X. Zhou, Differential Transformation and Its Applications for Electrical Circuits, Huazhong University Press, Wuhan, China, (1986).

[9] Liao, L. D., Chao, C. P., Huang, C. W. and Chiu, C. W.: dc dynamic and static pull-in predictions and analysis for electrostatically actuated clamped circular micro-plates based on a continuous model, J. Micromech. Microeng. Vol. 20 (2010).

DOI: 10.1088/0960-1317/20/2/025013

[10] Vogl G W V and Nayfeh A: A reduced-order model for electrically actuated clamped circular plates, J. Micromech. Microeng. Vol. 15 (2005), p.684–90.

DOI: 10.1088/0960-1317/15/4/002