Design and Validation of a Simulation-Based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

Abstract:

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A simulation-based modular planning and scheduling system developed for semiconductor fabrication facilities (SFFs) is discussed. Firstly, the general structure model (GSM) for SFFs, composed of a configurable definition layer, a physical layer, a process information layer and a planning and scheduling layer, is proposed. Secondly, a data-based dynamic simulation modeling method is given. Thirdly, a simulation-based modular planning and scheduling system (SMPSS) for SFFs, including model modules, release control modules, scheduling modules and rescheduling modules, is designed and developed. Finally, a case study is used to demonstrate the effectiveness of

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Periodical:

Edited by:

Zhixiang Hou

Pages:

378-381

DOI:

10.4028/www.scientific.net/AMM.48-49.378

Citation:

L. Li and F. Qiao, "Design and Validation of a Simulation-Based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities", Applied Mechanics and Materials, Vols. 48-49, pp. 378-381, 2011

Online since:

February 2011

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$35.00

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