Design and Validation of a Simulation-Based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

Li Li; Fei Qiao

doi:10.4028/www.scientific.net/AMM.48-49.378

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 48-49Design and Validation of a Simulation-Based...

Design and Validation of a Simulation-Based Modular Planning and Scheduling System of Semiconductor Fabrication Facilities

Abstract:

A simulation-based modular planning and scheduling system developed for semiconductor fabrication facilities (SFFs) is discussed. Firstly, the general structure model (GSM) for SFFs, composed of a configurable definition layer, a physical layer, a process information layer and a planning and scheduling layer, is proposed. Secondly, a data-based dynamic simulation modeling method is given. Thirdly, a simulation-based modular planning and scheduling system (SMPSS) for SFFs, including model modules, release control modules, scheduling modules and rescheduling modules, is designed and developed. Finally, a case study is used to demonstrate the effectiveness of

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Periodical:

Applied Mechanics and Materials (Volumes 48-49)

Pages:

378-381

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.48-49.378

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Online since:

February 2011

Authors:

Li Li, Fei Qiao

Keywords:

Planning, Scheduling, Semiconductor Manufacturing, Simulation

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