Aluminium Induced Crystallization of Amorphous Silicon via Solution Derived Catalyst

Ian Yi Yu Bu

doi:10.4028/www.scientific.net/AMM.481.3

Paper Titles

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Aluminium Induced Crystallization of Amorphous Silicon via Solution Derived Catalyst
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 481Aluminium Induced Crystallization of Amorphous...

Aluminium Induced Crystallization of Amorphous Silicon via Solution Derived Catalyst

Abstract:

In this paper, aluminum induced crystallization (AIC) was studied by examining the effect of using solution derived AlCl₃ catalyst. Such catalyst preparation method offers possibility of low-cost, non-vacuum solution process and allows examination of the role of alumina on the AIC process. The deposited AIC films were examined by using scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), Raman spectroscopy, X-ray diffraction (XRD) and four probe measurements. It was found that AIC process is highly dependent on annealing temperature and can occur at annealing temperatures above 500°C through Al₂O₃ formation. Based on the presented data, a possible growth model is proposed to clarify AIC mechanism.

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Periodical:

Applied Mechanics and Materials (Volume 481)

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3-6

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.481.3

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Online since:

December 2013

Authors:

Ian Yi Yu Bu

Keywords:

Aluminium Induced Crystallization, Composite Material, Nanocrystalline Materials, Nanoparticle

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