New Method to Fabrication 3D Micro-Device Structures

Abstract:

This paper present a new approach for fabricating 3D micro structures based on the elevated structures. The new fabrication method involves combinations of several basic techniques, but a key enabling techniques for the successful development of the fabrication process is combining the photolithography with e-beam lithography processes to create 3-D structures

• Periodical: Applied Mechanics and Materials (Volume 492)
• Pages: 286-290
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.492.286
• Online since: January 2014
• Authors: Adel Emhemmed, Abdulbast Kriama, Osama Terfaas, Graham Green
• Keywords: 3D Micro-Device, e-Beam Lithography, Electroplating, MEMS, Nano Fabrication Process, Photolithography

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