Research on Infrared Antireflective Characteristics of Two-Dimensional Sub-Wavelength Structures

Abstract:

In order to improve the transmission and durability of infrared optical materials, the antireflection characteristics of two dimensional sub-wavelength structures on infrared optical materials were investigated. The results of numerical modeling showed two dimensional sub-wavelength structures can improve the transmission of infrared optical materials over a broad band, especially pyramid structures. Then two dimensional sub-wavelength structures on Zinc sulfide were fabricated with contacting ultraviolet lithography and reactive ion etching, A substantial antireflection effect was obtained over the wavelength band 8~12 μm. To improve the environmental durability of the antireflective sub-wavelength structures, Germanium carbide film was deposited on the two dimensional sub-wavelength structures by reactive RF magnetron sputtering.

• Periodical: Applied Mechanics and Materials (Volumes 513-517)
• Pages: 363-366
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.513-517.363
• Online since: February 2014
• Authors: Qi Yuan Xu*, Zu Zhen Zhao, Yang Ping Li, Zheng Tang Liu, Yong Jin Xu, Yong Fa Zhu
• Keywords: Antireflection Characteristics, Film, Reactive Ion Etching, Rigorous Coupled Theory, Sub-Wavelength Structure

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