Femtosecond Laser Machining of Silica and Transparent Materials

Abstract:

Recently, interest in the study of processes occurring in the optical breakdown on the surface of solid targets associated with the increasing number of practical applications of the laser spark, such as laser induced breakdown spectroscopy and micro-and nanomaterials processing. One of the most important tasks - to reduce the diameter of the focal spot, because the size of the modifications directly related to it. However, it is not the only problem faced by the transition to sub-micron range modifications.

• Periodical: Applied Mechanics and Materials (Volume 525)
• Pages: 128-132
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.525.128
• Online since: February 2014
• Authors: M. Yu. Babiy, S. S. Golik, A. V. Kolesnikov, F. G. Bystrov
• Keywords: Ablation, Femtosecond Laser, Femtosecond Machining, Glass, Laser Micromachining, Nanoposition, Silica Ablation

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