Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

Ying Jun Chen; Yan Mei Li; Qing Hua Chen; Wen Gang Wu

doi:10.4028/www.scientific.net/AMM.529.169

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Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process
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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 529Fabrication of the Open-Loop MEMS-Based Tilting...

Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

Abstract:

In this paper, a kind of novel open-loop two-stage torsion-mirror optical actuators has been demonstrated. The mirrors are fabricated in SOI wafers, and exhibit good basic electromechanical characteristics. They provide an impetus to being brought into use as optical switches or attenuators, etc. for fiber communication applications.

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Periodical:

Applied Mechanics and Materials (Volume 529)

Pages:

169-172

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.529.169

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Online since:

June 2014

Authors:

Ying Jun Chen*, Yan Mei Li, Qing Hua Chen, Wen Gang Wu

Keywords:

Fabrication, MEMS, Micromirror, Open-Loop, Tilting

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* - Corresponding Author

References

[1] Peng Chunrong, Chen Xianxiang, Xia Shanhong. Electric field micro-sensor based on electrostatic comb-driven and differential detecting. Chinese Mechanical Engine, 2005, 16: 171.

DOI: 10.1109/memsys.2006.1627895

Google Scholar

[2] Riehl P, Scott K, Muller R, et al, Electrostatic charge and field sensors based on micromechanical resonators. J Microelectromech Syst, 2003, 12(5): 577.

DOI: 10.1109/jmems.2003.818066

Google Scholar

[3] Laura A.O., Christopher B.B., Kimberly L. T, 2009, Robust micro-rate sensor actuated by parametric resonance, Sensors and Actuators A, 152: 80-87.

DOI: 10.1016/j.sna.2009.03.010

Google Scholar

[4] Shavezipura, M., Ponnambalamb, K., Khajepoura, A. and Hashemic, S.M., 2008, Fabrication uncertainties and yield optimization in MEMS tunable capacitors. Sensors and Actuators A, 147: 613-622.

DOI: 10.1016/j.sna.2008.03.025

Google Scholar

[5] Yang Pengfei, Peng Chunrong, Xia Shanhong. Design and testing of a SOI electric-field microsensor. Journal of Electronics & Information Technology, 2011, 33(11): 2771.

DOI: 10.3724/sp.j.1146.2010.01285

Google Scholar