High Precision Low Power Quartz Temperature Transducer

Abstract:

This paper presents the design, fabrication and characterization of quartz tuning fork temperature sensor which is based on new ZY-cut-quartz crystal bulk acoustic wave resonator vibrating in a flexural mode. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted and the thermal sensing characteristics were examined by measuring the resonance frequency shift of this sensor cause by an external temperature. The sensor prototype was successfully fabricated and calibrated from operating from 0°C to 100°C with sensitivity of 70ppm/°C. Experimental results show the sensor has high thermal sensitivity, good stability and well reproducibility. This work represents high precision and low power temperature sensor using the comprehensive thermal characterization of ZY-cut-quartz tuning fork resonator.

• Periodical: Applied Mechanics and Materials (Volumes 530-531)
• Pages: 79-82
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.530-531.79
• Online since: February 2014
• Authors: Chang Fu Li, Jing Ma, Fang He
• Keywords: Quartz Micromachining, Temperature Sensor, Thermal Sensing, Tuning Fork, Zy-Cut Quartz

References

[1] S Tadigadapa and Mateti, Piezoelectric MEMS Sensors: State-of-the-art and Perspectives, Meas. Sci. Technolol., 20 (2009) 1-30.

DOI: 10.1088/0957-0233/20/9/092001

[2] J. M. Friedt and E. Carry, Introduction to the Quartz Tuning Fork, Am. J. Phys. 75(2007) 415-422.

DOI: 10.1119/1.2711826

[3] M. Gil, T. Manzaneque, J. H. Garcia, A. Ababenh, H. seidel and J. L. Rojas, Piezoelectric Micro-Scale Tuning Fork Resonators for Sensing Application, IEEE Transducer 2011, Beijing, 2011 1496-1499.

DOI: 10.1109/transducers.2011.5969682

[4] E. Eernisse, R. Ward and R. Wiggins, Survey of Quartz Bulk Resonator Sensor Technologies, IEEE Trans. Ultrason. Ferroelectr. Freq. Control UFFC, 35(1998) 106-113.

DOI: 10.1109/58.20453

[5] Errol P. EerNisse and Robert B. Wiggins, Review of Thickness-shear Mode Quartz Resonator Sensors for Temperature and Pressure, IEEE Sensors Journal. 1(2001) 79-87.

DOI: 10.1109/jsen.2001.923590

[6] Marcelo B. Pisani, Kailiang Ren, Ping Kao and Srinivas Tadigadapa, Application of Micromachined Y-Cut-Quartz Bulk Acoustic Wave Resonator for Infrarared Sensing, JMEMS. 20(2011) 288-296.

DOI: 10.1109/jmems.2010.2100030

[7] Kailiang Ren, Marcelo B. Pisani, Ping Kao and Srinivas Tadigadapa, Micromachined Quartz Resonator-Based High Performance Thermal Sensors, IEEE Sensors 2010, Hawaii, 2010 2197-2201.

DOI: 10.1109/icsens.2010.5690612

[8] Z. Hao, A. Erbil, and F. Ayazi, An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations, Sensors and Actuators. A, 109(2003) 156–164.

DOI: 10.1016/j.sna.2003.09.037