Design of a 6-DOF VCM-Driven Micro Stage

Jae Heon Jeong; Myeong Hyeon Kim; Si Woong Woo; Da Hoon Ahn; Dong Pyo Hong

doi:10.4028/www.scientific.net/AMM.532.3

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HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vol. 532Design of a 6-DOF VCM-Driven Micro Stage

Design of a 6-DOF VCM-Driven Micro Stage

Abstract:

This paper presents design of micro stage performing 6 degree-of-freedom (DOF) motions, which actuated by voice coil motor (VCM). The VCMs generate forces to perform in-plane motions and out-of-plane motions. The stage is supported by springs for compensating mass of the moving part of the stage and the stiffness of the springs has been chosen to meet the moving range requirement and to have high resonant frequency at the same time. Moving magnet type has been selected against moving coil type due to few merits of the type. The size of the stage is 380 X 380 X 60 mm³ and the motions are measured by laser interferometer and gap sensors.

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Periodical:

Applied Mechanics and Materials (Volume 532)

Pages:

3-6

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.532.3

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Online since:

February 2014

Authors:

Jae Heon Jeong, Myeong Hyeon Kim, Si Woong Woo, Da Hoon Ahn, Dong Pyo Hong

Keywords:

6-Degree of Freedom, Nanopositioning, Spring, Stage, Voice Coil Motor (VCM)

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References

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