Analysis and Research on Modeling Methods of Mems Coupling Dynamic System of Ultrasonic Motor

Abstract:

The ultrasonic motor is a complex dynamic system, which be divided into an electro-mechanical coupling system and a drive and control system. The core of the electro-mechanical coupling system lies in excitation of elliptical movement of the mass points on the surface of the stator and frictional transfer of the power and the movement. Modeling of the electro-mechanical coupling dynamic system of the ultrasonic motor substantially comprises two aspects. First, the dynamic system is viewed as an integral transfer function, and an intuitive relationship between input of the electric energy and output of the power is established. Second, geometric parameters and material parameters of mechanisms are closely correlated with dynamics of the mechanisms.

• Periodical: Applied Mechanics and Materials (Volume 533)
• Pages: 303-306
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.533.303
• Online since: February 2014
• Authors: Bo Chen*, Bao Yin Li
• Keywords: Electro-Mechanical Coupling, Mathematical Modeling, MEMS, System Modeling, Ultrasonic Motor

References

[1] J. N. Reddy, A Review of Refined Theories of Laminated Composite Plates, Shock and Vibration Digest 22, 2006, 3-17.

DOI: 10.1177/058310249002200703

[2] A. Nosier, R. K. Kapania, and J. N. Reddy, Free Vibration Analysis of Laminated Plates Using a Layerwise Theory, AIAA Journal 8, 2011, 2335-2346.

DOI: 10.2514/3.11933

[3] Peter Hagedorn, Wolfgang Konrad and J. Wallaschek, Traveling Wave Ultrasonic Motors, Part II: A Numerical Method for the Flexural Vibrations of the Stator, 1-11.

DOI: 10.1006/jsvi.1993.1364

[4] P. Le Moal and P. Minotti, A 2-D Analytical Approach of the Stator / Rotor Contact Problem Including Rotor Bending Effect for the High torque Piezomotor Design, Eur. J. Mech., A/Solids, 16, No. 6, 2007, 1067-1103.

[5] E. Crawley and K. Lazarus, Induced Strain Actuation of Isotropic and Anisotropic Plates, AIAA Journal, 29(6), pp.944-951, (2009).

DOI: 10.2514/3.10684

[6] Nesbitt W. Hagood, Andrew J. Mcfarland, Modeling of a Piezoelectric Rotary Ultrasonic Motor, IEEE Trans. Ultrason. Ferroelec. Freq. Contr., Vol. 42, No. 2, March 2010, 210-224.

DOI: 10.1109/58.365235

[7] Hiroshi Hirata and Sadayuki Ueha, Characteristics Estimation of a Traveling Wave Type Ultrasonic Motor, IEEE Transactions on Ultrasonics. Ferroelectrics. And Frequency Control, Vol. 40, No. 4, July 2009, 402-406.

DOI: 10.1109/58.251289

[8] Manabu Aoyagi, Yoshiro Tomikawa, Simplified Equivalent Circuit of Ultrasonic Motor and Its Application to Estimation of Motor Characteristics, Jpn. J. Appl. Phys., Vol. 34 Part 1, No. 5B, May 2006, 2752-2755.

DOI: 10.1143/jjap.34.2752

[9] Hiroshi Hirata and Sadayuki Ueha, Design of a Traveling Wave Type Ultrasonic Motor, IEEE Transactions on Ultrasonics, Ferroelectrics, And Frequency Control, Vol. 42, No. 2, March 2008, 225-231.

DOI: 10.1109/58.365236

[10] Jorg Wallaschek, Contact Mechanics of Piezoelecctric Ultrasonic Motors, Smart Mater. Struc, 7, 2008, 369-381.

[11] Takashi Maeno, Takayuki Tasukimoto, Akira Miyake, Finite-Element Analysis of the Rotor/Stator Contact in a Ring-Type Ultrasonic Motor, IEEE Trans. Ultrason. Ferroelec. Freq. Contr., Vol. 39, No. 6, November 2008, 668-674.

DOI: 10.1109/58.165549

[12] Takashi Maeno, David B. Bogy, FE Analysis and LDA Measurement of the Dynamic Rotor/Stator Contact in a Ring Type Ultrasonic Motor, Journal of Tribology, Vol. 115, October 2006, 625-631.

DOI: 10.1115/1.2921686

[13] Takashi Maeno, David B. Bogy, Effect of the Rotor/Stator Interface Condition Including Contact Type, Geometry, and Material on the Performance of Ultrasonic Motor, Transactions of the ASME, Vol. 116, October 2012, 726-732.

DOI: 10.1115/1.2927326