Position Estimation in Singly-Fed Electrostatic Actuation Systems by Superposing Sensing Signals

Abstract:

A built-in position sensing circuit for a singly-fed electrostatic actuator, where only the stationary element has voltage feeding wires, is discussed. The sensing is realized by superposing a high-frequency sensing signal onto the actuating wires. The paper mathematically analyzes its operation and discusses potential problems from the experimental results. The problems are vulnerability of the sensor operation to the change of impedance of the actuating power sources and to the gap variation. Electrode segmentation is proposed as a possible solution.

• Periodical: Applied Mechanics and Materials (Volumes 541-542)
• Pages: 1487-1491
• DOI: https://doi.org/10.4028/www.scientific.net/AMM.541-542.1487
• Online since: March 2014
• Authors: Akio Yamamoto, Junro Suzuki
• Keywords: Built-In Position Sensor, Electrostatic Actuator, Induction Actuator, Sheet Handling

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