Development of Piezo Driven Motion Amplified Stage

Jung Hyun Kim

doi:10.4028/www.scientific.net/AMM.541-542.742

Paper Titles

Method of Ginkgo biloba Drying and Drying Machine Design
p.722

Modeling, Simulation and Design Optimization of a Series Hydraulic Hybrid Vehicle
p.727

Movement Simulation of NC Lathe Machine Based on EON Studio
p.732

Research and Control for Inertia of Automobile Steering Test System
p.737

Development of Piezo Driven Motion Amplified Stage
p.742

Study on Development of a Urea-SCR System of Diesel Engine
p.747

Experimental Investigation and Numerical Simulation for High Temperature Air Source Heat Pump with New Mixed-Refrigerant
p.752

Simulation Study on the Combined Harvester with Four Tracked Feet Passing through Ditch Based on RecurDyn
p.756

Simulation Investigation about Combustion and Emission Characteristics of n-Butanol/Diesel Fuel Mixture on Diesel Engine
p.763

HomeApplied Mechanics and MaterialsApplied Mechanics and Materials Vols. 541-542Development of Piezo Driven Motion Amplified Stage

Development of Piezo Driven Motion Amplified Stage

Abstract:

This paper presents a novel piezo driven motion stage employing multiple motion levers allowing for an amplification ratio that exceeds 60x enabled by a newly contrived cross hinge structure. Measurements of the motion stage were made using an optical microscope. The motion stage was incorporated into a visually served close loop motion control scheme and experimental results prove that the feedback system is capable of 20nm nanostepping.

You might also be interested in these eBooks

Engineering and Manufacturing Technologies

View Preview

Info:

Periodical:

Applied Mechanics and Materials (Volumes 541-542)

Pages:

742-746

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.541-542.742

Citation:

Cite this paper

Online since:

March 2014

Authors:

Jung Hyun Kim

Keywords:

Compliant Mechanism, Micro-Motion Stage, Piezoelectric Actuator

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

Citation:

References

[1] F. E. Scire and E. C. Teague, Piezodriven 50μm range stage with subnanometer resolution, Rev. Sci. Instrum., Vol 49(1978), issue 12, pp.1735-1740.

DOI: 10.1063/1.1135327

Google Scholar

[2] S. B. Choi, S. S. Han, and Y. S. Lee, Fine motion control of a moving stage using a piezoactuator associated with a displacement amplifier, Smart Mater. Struct. 14, pp.222-230, (2005).

DOI: 10.1088/0964-1726/14/1/022

Google Scholar

[3] Byoung Hun Kang, John Ting-Yung Wen, NicholasG. Dagalakis, and Jason J. Gorma, Analysis and Design of Parallel Mechanisms With Flexure Joints, ROBOTICS, IEEE, Vol. 21(2005), No. 6, pp.1179-1185.

DOI: 10.1109/tro.2005.855989

Google Scholar

[4] P. Gao , S. -M. Swei and Z. Yuan A new piezodriven precision micropositioning stage utilizing flexure hinges, Nanotechnology, Vol. 10(1999), p.394.

DOI: 10.1088/0957-4484/10/4/306

Google Scholar

[5] T. -F. Lu , D. C. Handley , Y. K. Yong and C. Eales, A three-DOF compliant micromotion stage with flexure hinges, Ind. Robot, Vol. 31(2004), p.355.

DOI: 10.1108/01439910410541873

Google Scholar

[6] Kaixuan Hu, Jung H. Kim, James Schmiedeler, and Chia-Hsiang Menq, Design, implementation, and control of a six-axis compliant stage, Rev. Sci. Instrum. 79, 025105, (2008).

DOI: 10.1063/1.2841804

Google Scholar